Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (dire...

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Detalles Bibliográficos
Autores principales: Zhao, Yang, Xia, Guoming, Shi, Qin, Qiu, Anping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085690/
https://www.ncbi.nlm.nih.gov/pubmed/32155850
http://dx.doi.org/10.3390/s20051455

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085690/
https://www.ncbi.nlm.nih.gov/pubmed/32155850
http://dx.doi.org/10.3390/s20051455

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