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Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (dire...

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Detalles Bibliográficos
Autores principales: Zhao, Yang, Xia, Guoming, Shi, Qin, Qiu, Anping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085690/
https://www.ncbi.nlm.nih.gov/pubmed/32155850
http://dx.doi.org/10.3390/s20051455
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author Zhao, Yang
Xia, Guoming
Shi, Qin
Qiu, Anping
author_facet Zhao, Yang
Xia, Guoming
Shi, Qin
Qiu, Anping
author_sort Zhao, Yang
collection PubMed
description This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (direct current) scheme, AC polarization breaks the trade-off between input transistor gate size and white noise floor of TIA, a relative low input loading capacitance can be implemented for low noise consideration. Besides, a self-compensation technique combining polarization source and reference in automatic-gain-control (AGC) is put forward. It cancels the 1/f noise and drift introduced by the polarization source itself, which applies to both DC and AC polarization cases. The experimental result indicates the proposed AC polarization and self-compensation strategy expand the bias-instability of studied SOA from 2.58 μg to 0.51 μg with a full scale of ± 30 g, a 155.6 dB dynamic range is realized in this work.
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spelling pubmed-70856902020-04-21 Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation Zhao, Yang Xia, Guoming Shi, Qin Qiu, Anping Sensors (Basel) Article This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (direct current) scheme, AC polarization breaks the trade-off between input transistor gate size and white noise floor of TIA, a relative low input loading capacitance can be implemented for low noise consideration. Besides, a self-compensation technique combining polarization source and reference in automatic-gain-control (AGC) is put forward. It cancels the 1/f noise and drift introduced by the polarization source itself, which applies to both DC and AC polarization cases. The experimental result indicates the proposed AC polarization and self-compensation strategy expand the bias-instability of studied SOA from 2.58 μg to 0.51 μg with a full scale of ± 30 g, a 155.6 dB dynamic range is realized in this work. MDPI 2020-03-06 /pmc/articles/PMC7085690/ /pubmed/32155850 http://dx.doi.org/10.3390/s20051455 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhao, Yang
Xia, Guoming
Shi, Qin
Qiu, Anping
Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title_full Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title_fullStr Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title_full_unstemmed Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title_short Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
title_sort expanding bias-instability of mems silicon oscillating accelerometer utilizing ac polarization and self-compensation
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085690/
https://www.ncbi.nlm.nih.gov/pubmed/32155850
http://dx.doi.org/10.3390/s20051455
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