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Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation
This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (dire...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085690/ https://www.ncbi.nlm.nih.gov/pubmed/32155850 http://dx.doi.org/10.3390/s20051455 |