Fabrication of MEMS Directional Acoustic Sensors for Underwater Operation

In this work, microelectromechanical systems (MEMS)-based directional acoustic sensors operating in an underwater environment are explored. The studied sensors consist of a free-standing single wing or two wings pivoted to a substrate. The sensors operate in a narrow frequency band determined by the...

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Detalles Bibliográficos
Autores principales: Espinoza, Alberto, Alves, Fabio, Rabelo, Renato, Da Re, German, Karunasiri, Gamani
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085756/
https://www.ncbi.nlm.nih.gov/pubmed/32106454
http://dx.doi.org/10.3390/s20051245

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085756/
https://www.ncbi.nlm.nih.gov/pubmed/32106454
http://dx.doi.org/10.3390/s20051245

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