A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer

This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on [Formula: see text]-phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was develop...

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Detalles Bibliográficos
Autores principales: Wu, Ting, Jin, Hao, Dong, Shurong, Xuan, Weipeng, Xu, Hongsheng, Lu, Leihe, Fang, Zijing, Huang, Shuyi, Tao, Xiang, Shi, Lin, Liu, Shuting, Luo, Jikui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085767/
https://www.ncbi.nlm.nih.gov/pubmed/32121461
http://dx.doi.org/10.3390/s20051346

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7085767/
https://www.ncbi.nlm.nih.gov/pubmed/32121461
http://dx.doi.org/10.3390/s20051346

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