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Interfacial effects on leakage currents in Cu/α-cristobalite/Cu junctions
As the miniaturization trend of integrated circuit continues, the leakage currents flow through the dielectric films insulating the interconnects become a critical issue. However, quantum transport through the mainstream on-chip interfaces between interconnects and dielectrics has not been addressed...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7093521/ https://www.ncbi.nlm.nih.gov/pubmed/32210324 http://dx.doi.org/10.1038/s41598-020-62356-6 |