Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser

Calcium fluoride (CaF(2)) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applicati...

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Detalles Bibliográficos
Autores principales: Li, Xin, Dou, Xian-an, Zhu, Hong, Hu, Yue, Wang, Xi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7099012/
https://www.ncbi.nlm.nih.gov/pubmed/32218532
http://dx.doi.org/10.1038/s41598-020-62469-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7099012/
https://www.ncbi.nlm.nih.gov/pubmed/32218532
http://dx.doi.org/10.1038/s41598-020-62469-y

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