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Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser

Calcium fluoride (CaF(2)) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applicati...

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Autores principales: Li, Xin, Dou, Xian-an, Zhu, Hong, Hu, Yue, Wang, Xi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7099012/
https://www.ncbi.nlm.nih.gov/pubmed/32218532
http://dx.doi.org/10.1038/s41598-020-62469-y
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author Li, Xin
Dou, Xian-an
Zhu, Hong
Hu, Yue
Wang, Xi
author_facet Li, Xin
Dou, Xian-an
Zhu, Hong
Hu, Yue
Wang, Xi
author_sort Li, Xin
collection PubMed
description Calcium fluoride (CaF(2)) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applications could be limited. Therefore, the research on the damage characteristics and laser damage resistance of CaF(2) crystals is urgent. A 3D Finite-Difference Time-Domain (FDTD) method with Maxwell spinor equation is used, and the results show that the electric field intensity of rear surface is larger than that of front surface, which causes a lower threshold and is consistent with the experimental observations. And a thermo-mechanical coupled finite element model (FEM) of CaF(2) with Ce(2)O(3) impurities, which are introduced by polishing process, has semiquantitatively described the damage mechanism of CaF(2) by 248 nm-excimer laser.
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spelling pubmed-70990122020-03-30 Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser Li, Xin Dou, Xian-an Zhu, Hong Hu, Yue Wang, Xi Sci Rep Article Calcium fluoride (CaF(2)) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applications could be limited. Therefore, the research on the damage characteristics and laser damage resistance of CaF(2) crystals is urgent. A 3D Finite-Difference Time-Domain (FDTD) method with Maxwell spinor equation is used, and the results show that the electric field intensity of rear surface is larger than that of front surface, which causes a lower threshold and is consistent with the experimental observations. And a thermo-mechanical coupled finite element model (FEM) of CaF(2) with Ce(2)O(3) impurities, which are introduced by polishing process, has semiquantitatively described the damage mechanism of CaF(2) by 248 nm-excimer laser. Nature Publishing Group UK 2020-03-26 /pmc/articles/PMC7099012/ /pubmed/32218532 http://dx.doi.org/10.1038/s41598-020-62469-y Text en © The Author(s) 2020 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Li, Xin
Dou, Xian-an
Zhu, Hong
Hu, Yue
Wang, Xi
Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title_full Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title_fullStr Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title_full_unstemmed Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title_short Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
title_sort nanosecond laser-induced surface damage and its mechanism of caf(2) optical window at 248 nm krf excimer laser
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7099012/
https://www.ncbi.nlm.nih.gov/pubmed/32218532
http://dx.doi.org/10.1038/s41598-020-62469-y
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