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Nanosecond laser-induced surface damage and its mechanism of CaF(2) optical window at 248 nm KrF excimer laser
Calcium fluoride (CaF(2)) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applicati...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7099012/ https://www.ncbi.nlm.nih.gov/pubmed/32218532 http://dx.doi.org/10.1038/s41598-020-62469-y |