Optical Detection Method for High Aspect Ratio Microstructures

High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures after each process. However, there is no suitab...

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Detalles Bibliográficos
Autores principales: Wei, Wenbin, Hou, Shuangyue, Wu, Zhao, Hu, Yue, Wang, Yi, Chen, Lijuan, Xiong, Ying, Tian, Yangchao, Liu, Gang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142504/
https://www.ncbi.nlm.nih.gov/pubmed/32168956
http://dx.doi.org/10.3390/mi11030296

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142504/
https://www.ncbi.nlm.nih.gov/pubmed/32168956
http://dx.doi.org/10.3390/mi11030296

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