Microfabrication of Microlens by Timed-Development-and-Thermal-Reflow (TDTR) Process for Projection Lithography

This paper presents a microlens fabrication process using the timed-development-and-thermal-reflow process, which can fabricate various types of aperture geometry with a parabolic profile on a single substrate in the same batch of the process. By controlling the development time of the uncrosslinked...

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Detalles Bibliográficos
Autores principales: Tan, Jun Ying, Goh, Gyuhyeong, Kim, Jungkwun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142525/
https://www.ncbi.nlm.nih.gov/pubmed/32156007
http://dx.doi.org/10.3390/mi11030277

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7142525/
https://www.ncbi.nlm.nih.gov/pubmed/32156007
http://dx.doi.org/10.3390/mi11030277

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