A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS....

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Detalles Bibliográficos
Autores principales: Ge, Chang, Cretu, Edmond
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143283/
https://www.ncbi.nlm.nih.gov/pubmed/32197487
http://dx.doi.org/10.3390/mi11030317

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143283/
https://www.ncbi.nlm.nih.gov/pubmed/32197487
http://dx.doi.org/10.3390/mi11030317

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