Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels

This paper presents a novel fabrication process that allows integration of polydimethylsiloxane (PDMS)-based microfluidic channels and metal electrodes on a wafer with a micrometer-range alignment accuracy. This high level of alignment accuracy enables integration of microwave and microfluidic techn...

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Detalles Bibliográficos
Autores principales: Bao, Juncheng, Markovic, Tomislav, Brancato, Luigi, Kil, Dries, Ocket, Ilja, Puers, Robert, Nauwelaers, Bart
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143474/
https://www.ncbi.nlm.nih.gov/pubmed/32204493
http://dx.doi.org/10.3390/mi11030320

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143474/
https://www.ncbi.nlm.nih.gov/pubmed/32204493
http://dx.doi.org/10.3390/mi11030320

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