On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses...

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Detalles Bibliográficos
Autores principales: Massimino, Gianluca, Colombo, Alessandro, Ardito, Raffaele, Quaglia, Fabio, Corigliano, Alberto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143486/
https://www.ncbi.nlm.nih.gov/pubmed/32183377
http://dx.doi.org/10.3390/mi11030307

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143486/
https://www.ncbi.nlm.nih.gov/pubmed/32183377
http://dx.doi.org/10.3390/mi11030307

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