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On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses
This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143486/ https://www.ncbi.nlm.nih.gov/pubmed/32183377 http://dx.doi.org/10.3390/mi11030307 |