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Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz
Single-crystal quartz material is widely applied in the manufacture of resonators and sensors, but it is difficult to process because of its high hardness. A novel way to fabricate single-crystal quartz structures is proposed in this paper; the method includes quartz-on-silicon (QoS) technology and...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143568/ https://www.ncbi.nlm.nih.gov/pubmed/32214010 http://dx.doi.org/10.3390/mi11030337 |