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One-Step Femtosecond Laser Stealth Dicing of Quartz

We report on a one-step method for cutting 250-µm-thick quartz plates using highly focused ultrashort laser pulses with a duration of 200 fs and a wavelength of 1030 nm. We show that the repetition rate, the scan speed, the pulse overlap and the pulse energy directly influence the cutting process an...

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Detalles Bibliográficos
Autores principales: Gaudiuso, Caterina, Volpe, Annalisa, Ancona, Antonio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143800/
https://www.ncbi.nlm.nih.gov/pubmed/32235686
http://dx.doi.org/10.3390/mi11030327