Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalize...

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Detalles Bibliográficos
Autores principales: Akan, Rabia, Frisk, Thomas, Lundberg, Fabian, Ohlin, Hanna, Johansson, Ulf, Li, Kenan, Sakdinawat, Anne, Vogt, Ulrich
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143916/
https://www.ncbi.nlm.nih.gov/pubmed/32183040
http://dx.doi.org/10.3390/mi11030301

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7143916/
https://www.ncbi.nlm.nih.gov/pubmed/32183040
http://dx.doi.org/10.3390/mi11030301

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