Fabrication of Si Micropore and Graphene Nanohole Structures by Focused Ion Beam

A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as...

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Detalles Bibliográficos
Autores principales: Md Ibrahim, Nik Noor Nabilah, Hashim, Abdul Manaf
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146166/
https://www.ncbi.nlm.nih.gov/pubmed/32178225
http://dx.doi.org/10.3390/s20061572

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146166/
https://www.ncbi.nlm.nih.gov/pubmed/32178225
http://dx.doi.org/10.3390/s20061572

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