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Fabrication of Si Micropore and Graphene Nanohole Structures by Focused Ion Beam
A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146166/ https://www.ncbi.nlm.nih.gov/pubmed/32178225 http://dx.doi.org/10.3390/s20061572 |