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Effects of Air Cavity in Dynamic Pressure Sensors: Experimental Validation
An air-backed diaphragm is the key structure of most dynamic pressure sensors and plays a critical role in determining the sensor performance. Our previous analytical model investigated the influence of air cavity length on the sensitivity and bandwidth. The model found that as the cavity length dec...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146275/ https://www.ncbi.nlm.nih.gov/pubmed/32235761 http://dx.doi.org/10.3390/s20061759 |