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Effects of Air Cavity in Dynamic Pressure Sensors: Experimental Validation

An air-backed diaphragm is the key structure of most dynamic pressure sensors and plays a critical role in determining the sensor performance. Our previous analytical model investigated the influence of air cavity length on the sensitivity and bandwidth. The model found that as the cavity length dec...

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Detalles Bibliográficos
Autores principales: Dong, Qian, Song, Xiaolei, Liu, Haijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146275/
https://www.ncbi.nlm.nih.gov/pubmed/32235761
http://dx.doi.org/10.3390/s20061759

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