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Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams
A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146347/ https://www.ncbi.nlm.nih.gov/pubmed/32213816 http://dx.doi.org/10.3390/s20061780 |