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Ionization Gas Sensor Using Suspended Carbon Nanotube Beams

An ionization sensor based on suspended carbon nanotubes (CNTs) was presented. A suspended CNT beam was fabricated by a low-temperature surface micromachining process using SU8 photoresist as the sacrificial layer. Application of a bias to the CNT beam generated very high non-linear electric fields...

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Detalles Bibliográficos
Autores principales: Arunachalam, Shivaram, Izquierdo, Ricardo, Nabki, Frederic
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7146359/
https://www.ncbi.nlm.nih.gov/pubmed/32192059
http://dx.doi.org/10.3390/s20061660