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NH(3) Plasma-Treated Magnesium Doped Zinc Oxide in Biomedical Sensors with Electrolyte–Insulator–Semiconductor (EIS) Structure for Urea and Glucose Applications
This study compared the sensing characteristics of ZnO (ZO) treated with ammonia (NH(3)) plasma for 1 min, 3 min, and 6 min, under the EIS structure. The measurement results revealed that, after 3 min of NH(3) plasma treatment, the Mg-doped ZnO (MZO) sensing film had a high hydrogen ion sensitivity,...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7153511/ https://www.ncbi.nlm.nih.gov/pubmed/32210105 http://dx.doi.org/10.3390/nano10030583 |