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NH(3) Plasma-Treated Magnesium Doped Zinc Oxide in Biomedical Sensors with Electrolyte–Insulator–Semiconductor (EIS) Structure for Urea and Glucose Applications

This study compared the sensing characteristics of ZnO (ZO) treated with ammonia (NH(3)) plasma for 1 min, 3 min, and 6 min, under the EIS structure. The measurement results revealed that, after 3 min of NH(3) plasma treatment, the Mg-doped ZnO (MZO) sensing film had a high hydrogen ion sensitivity,...

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Detalles Bibliográficos
Autores principales:	Lin, Chun Fu, Kao, Chyuan Haur, Lin, Chan Yu, Chen, Kuan Lin, Lin, Yun Hao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7153511/ https://www.ncbi.nlm.nih.gov/pubmed/32210105 http://dx.doi.org/10.3390/nano10030583

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