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Dataset for the comparison of vacuum-treated and as-etched porous silicon samples in terms of the evolution of oxidation at low temperatures
The development of chemical sensors made from porous silicon is a task that has been addressed for several years. In order to have a reliable sensing material, stability must be guaranteed. Oxidation in silicon degrades the sensing capability. The data presented in this article provides some importa...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7160521/ https://www.ncbi.nlm.nih.gov/pubmed/32322623 http://dx.doi.org/10.1016/j.dib.2020.105475 |