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Nanomechanical Cantilever Array Sensors

In recent years, mechanics has experienced a revival, as microfabrication technologies and nanotechnology are applied to produce tiny structures. The development of ultraprecise position sensing started three decades ago with a novel imaging technique called atomic force microscopy, which provides u...

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Detalles Bibliográficos
Autores principales: Lang, Hans Peter, Hegner, Martin, Gerber, Christoph
Formato: Online Artículo Texto
Lenguaje:English
Publicado: 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7176243/
http://dx.doi.org/10.1007/978-3-662-54357-3_15