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Nanomechanical Cantilever Array Sensors
In recent years, mechanics has experienced a revival, as microfabrication technologies and nanotechnology are applied to produce tiny structures. The development of ultraprecise position sensing started three decades ago with a novel imaging technique called atomic force microscopy, which provides u...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7176243/ http://dx.doi.org/10.1007/978-3-662-54357-3_15 |