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A Monoclinic V(1-x-y)Ti(x)Ru(y)O(2) Thin Film with Enhanced Thermal-Sensitive Performance
Preparing the thermal-sensitive thin films with high temperature coefficient of resistance (TCR) and low resistivity by a highly compatible process is favorable for increasing the sensitivity of microbolometers with small pixels. Here, we report an effective and process-compatible approach for prepa...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7176795/ https://www.ncbi.nlm.nih.gov/pubmed/32323077 http://dx.doi.org/10.1186/s11671-020-03322-z |