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A Monoclinic V(1-x-y)Ti(x)Ru(y)O(2) Thin Film with Enhanced Thermal-Sensitive Performance

Preparing the thermal-sensitive thin films with high temperature coefficient of resistance (TCR) and low resistivity by a highly compatible process is favorable for increasing the sensitivity of microbolometers with small pixels. Here, we report an effective and process-compatible approach for prepa...

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Detalles Bibliográficos
Autores principales:	Li, Yatao, Gu, Deen, Xu, Shiyang, Zhou, Xin, Yuan, Kai, Jiang, Yadong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2020
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7176795/ https://www.ncbi.nlm.nih.gov/pubmed/32323077 http://dx.doi.org/10.1186/s11671-020-03322-z

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