Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems

In this work, SiN(x)/a-Si/SiN(x) caps on conductive coplanar waveguides (CPWs) are proposed for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS), in view of the application of these devices in fifth generation (5G) and modern telecommunication systems. Simplificati...

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Detalles Bibliográficos
Autores principales: Persano, Anna, Quaranta, Fabio, Taurino, Antonietta, Siciliano, Pietro Aleardo, Iannacci, Jacopo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7180697/
https://www.ncbi.nlm.nih.gov/pubmed/32290063
http://dx.doi.org/10.3390/s20072133

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7180697/
https://www.ncbi.nlm.nih.gov/pubmed/32290063
http://dx.doi.org/10.3390/s20072133

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