MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaph...

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Detalles Bibliográficos
Autores principales: Zhou, Ning, Jia, Pinggang, Liu, Jia, Ren, Qianyu, An, Guowen, Liang, Ting, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7218883/
https://www.ncbi.nlm.nih.gov/pubmed/32326548
http://dx.doi.org/10.3390/s20082233

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7218883/
https://www.ncbi.nlm.nih.gov/pubmed/32326548
http://dx.doi.org/10.3390/s20082233

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