Cargando…

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements

A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaph...

Descripción completa

Detalles Bibliográficos
Autores principales:	Zhou, Ning, Jia, Pinggang, Liu, Jia, Ren, Qianyu, An, Guowen, Liang, Ting, Xiong, Jijun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7218883/ https://www.ncbi.nlm.nih.gov/pubmed/32326548 http://dx.doi.org/10.3390/s20082233

Ejemplares similares

An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications
por: Jia, Pinggang, et al.
Publicado: (2021)

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
por: Feng, Fei, et al.
Publicado: (2021)

High-Temperature Fiber-Optic Fabry–Perot Vibration Sensor Based on Single-Crystal Sapphire
por: Liu, Hua, et al.
Publicado: (2023)

An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement
por: Chen, Dong, et al.
Publicado: (2020)

A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
por: Wang, Suwei, et al.
Publicado: (2022)

Diaphragm-Free Fiber-Optic Fabry-Perot Interferometric Gas Pressure Sensor for High Temperature Application
por: Liang, Hao, et al.
Publicado: (2018)

An Accelerometer Based on All Silica In-Line Fiber Fabry-Perot Etalon for High Temperature up to 800 °C
por: Qian, Jiang, et al.
Publicado: (2022)

A Differential Reflective Intensity Optical Fiber Angular Displacement Sensor
por: Jia, Binghui, et al.
Publicado: (2016)

A Wide-Range Displacement Sensor Based on Plastic Fiber Macro-Bend Coupling
por: Liu, Jia, et al.
Publicado: (2017)

A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit
por: Yao, Zong, et al.
Publicado: (2016)

An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments
por: Xiong, Jijun, et al.
Publicado: (2015)

Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor
por: Yao, Zong, et al.
Publicado: (2016)

Acetone Sensor Based on FAIMS-MEMS
por: Zhang, Junna, et al.
Publicado: (2021)

A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C
por: Tan, Qiulin, et al.
Publicado: (2014)

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing
por: Reck, Kasper, et al.
Publicado: (2011)

A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
por: Qi, Yonghong, et al.
Publicado: (2022)

Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection
por: Zhao, Zhujie, et al.
Publicado: (2023)

Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors
por: Si, Wenrong, et al.
Publicado: (2019)

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments
por: Li, Chen, et al.
Publicado: (2015)

An Optical MEMS Acoustic Sensor Based on Grating Interferometer
por: Zhang, Mengying, et al.
Publicado: (2019)

A Miniature Fiber Optic Refractive Index Sensor Built in a MEMS-Based Microchannel
por: Tian, Ye, et al.
Publicado: (2011)

A Micro Bubble Structure Based Fabry–Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics
por: Yan, Lu, et al.
Publicado: (2017)

Recent Progress of Miniature MEMS Pressure Sensors
por: Song, Peishuai, et al.
Publicado: (2020)

Novel Designs for Application Specific MEMS Pressure Sensors
por: Fragiacomo, Giulio, et al.
Publicado: (2010)

An update on the CardioMEMS pulmonary artery pressure sensor
por: Ayyadurai, Puvanalingam, et al.
Publicado: (2019)

Correction: Yan, L., et al. A Micro Bubble Structure Based Fabry–Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics Sensors, 2017, 17, 555.
por: Yan, Lu, et al.
Publicado: (2018)

Intensity-Modulated Polymer Optical Fiber-Based Refractive Index Sensor: A Review
por: Teng, Chuanxin, et al.
Publicado: (2021)

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
por: Du, Yi-Jia, et al.
Publicado: (2018)

MEMS Differential Pressure Sensor with Dynamic Pressure Canceler for Precision Altitude Estimation
por: Yasunaga, Shun, et al.
Publicado: (2023)

Directional Sensitivity of a MEMS-Based Fiber-Optic Extrinsic Fabry–Perot Ultrasonic Sensor for Partial Discharge Detection
por: Si, Wenrong, et al.
Publicado: (2018)

Fiber-Optic Chemical Sensors and Fiber-Optic Bio-Sensors
por: Pospíšilová, Marie, et al.
Publicado: (2015)

A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
por: Tan, Qiulin, et al.
Publicado: (2013)

Recent Progress of Nanodiamond Film in Controllable Fabrication and Field Emission Properties
por: Guo, Xin, et al.
Publicado: (2023)

Progress on Optical Fiber Biochemical Sensors Based on Graphene
por: Zhang, Yani, et al.
Publicado: (2022)

Textile Pressure Sensor Made of Flexible Plastic Optical Fibers
por: Rothmaier, Markus, et al.
Publicado: (2008)

Polymer Optical Fiber Plantar Pressure Sensors: Design and Validation
por: Safarloo, Sahar, et al.
Publicado: (2022)

A novel fiber-optic pressure sensor device for measuring variceal pressure
por: Wang, Xi, et al.
Publicado: (2019)

Measurement of vitreous humor pressure in vivo using an optic fiber pressure sensor
por: Mimura, Masashi, et al.
Publicado: (2023)

A Novel High-Sensitivity MEMS Pressure Sensor for Rock Mass Stress Sensing
por: Wang, Honghui, et al.
Publicado: (2022)

Compact Sphere-Shaped Airflow Vector Sensor Based on MEMS Differential Pressure Sensors
por: Haneda, Kotaro, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_86ttbf1h04tbvk50p8t634330f