Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

This paper presents a micromachining process for lithium niobate (LiNbO(3)) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was p...

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Detalles Bibliográficos
Autores principales: Al-Shibaany, Zeyad Yousif Abdoon, Penchev, Pavel, Hedley, John, Dimov, Stefan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7218913/
https://www.ncbi.nlm.nih.gov/pubmed/32295102
http://dx.doi.org/10.3390/s20082206

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7218913/
https://www.ncbi.nlm.nih.gov/pubmed/32295102
http://dx.doi.org/10.3390/s20082206

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