Vibration Control of Scanning Electron Microscopes with Experimental Approaches for Performance Enhancement

A vibration isolator embedded in precision equipment, such as a scanning electron microscope (SEM), wafer inspection equipment, and nanoimprint lithography equipment, play a critical role in achieving the maximum performance of the equipment during the fabrication of nano/micro-electro-mechanical sy...

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Detalles Bibliográficos
Autores principales: Shin, Yun-Ho, Moon, Seok-Jun, Kim, Yong-Ju, Oh, Ki-Yong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219080/
https://www.ncbi.nlm.nih.gov/pubmed/32316441
http://dx.doi.org/10.3390/s20082277

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219080/
https://www.ncbi.nlm.nih.gov/pubmed/32316441
http://dx.doi.org/10.3390/s20082277

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