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Vibration Control of Scanning Electron Microscopes with Experimental Approaches for Performance Enhancement
A vibration isolator embedded in precision equipment, such as a scanning electron microscope (SEM), wafer inspection equipment, and nanoimprint lithography equipment, play a critical role in achieving the maximum performance of the equipment during the fabrication of nano/micro-electro-mechanical sy...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219080/ https://www.ncbi.nlm.nih.gov/pubmed/32316441 http://dx.doi.org/10.3390/s20082277 |