The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions

In this paper, an infinite circular ZnO thin film bulk acoustic resonator (FBAR) with a frame-like electrode operating at the thickness-extensional (TE) mode is studied. Two-dimensional scalar differential equations established for the problem in the Cartesian coordinate system are successfully solv...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhao, Xueli, Zhao, Zinan, Wang, Bin, Qian, Zhenghua, Ma, Tingfeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219592/
https://www.ncbi.nlm.nih.gov/pubmed/32340295
http://dx.doi.org/10.3390/s20082408

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7219592/
https://www.ncbi.nlm.nih.gov/pubmed/32340295
http://dx.doi.org/10.3390/s20082408

Ejemplares similares