Piezoelectric BiFeO(3) Thin Films: Optimization of MOCVD Process on Si

This paper presents a simple and optimized metal organic chemical vapor deposition (MOCVD) protocol for the deposition of perovskite BiFeO(3) films on silicon-based substrates, in order to move toward the next generation of lead-free hybrid energy harvesters. A bi-metal mixture that is composed of B...

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Detalles Bibliográficos
Autores principales: Micard, Quentin, Condorelli, Guglielmo Guido, Malandrino, Graziella
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221529/
https://www.ncbi.nlm.nih.gov/pubmed/32231101
http://dx.doi.org/10.3390/nano10040630

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221529/
https://www.ncbi.nlm.nih.gov/pubmed/32231101
http://dx.doi.org/10.3390/nano10040630

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