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Piezoelectric BiFeO(3) Thin Films: Optimization of MOCVD Process on Si
This paper presents a simple and optimized metal organic chemical vapor deposition (MOCVD) protocol for the deposition of perovskite BiFeO(3) films on silicon-based substrates, in order to move toward the next generation of lead-free hybrid energy harvesters. A bi-metal mixture that is composed of B...
Autores principales: | Micard, Quentin, Condorelli, Guglielmo Guido, Malandrino, Graziella |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221529/ https://www.ncbi.nlm.nih.gov/pubmed/32231101 http://dx.doi.org/10.3390/nano10040630 |
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