Generating Silicon Nanofiber Clusters from Grinding Sludge by Millisecond Pulsed Laser Irradiation

Silicon nanofiber clusters were successfully generated by the irradiation of millisecond pulsed laser light on silicon sludge disposed from wafer back-grinding processes. It was found that the size, intensity, and growing speed of the laser-induced plume varied with the gas pressure, while the size...

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Detalles Bibliográficos
Autores principales: Momoki, Ko, Takahashi, Kunimitsu, Kobinata, Kyosuke, Kobayashi, Yoshikazu, Kawai, Akihito, Yan, Jiwang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221718/
https://www.ncbi.nlm.nih.gov/pubmed/32340381
http://dx.doi.org/10.3390/nano10040812

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221718/
https://www.ncbi.nlm.nih.gov/pubmed/32340381
http://dx.doi.org/10.3390/nano10040812

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