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Development of Pd/TiO(2) Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H(2) Gas Sensor
The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO(2) and bilayer films of Pd/TiO(2) were deposited on the quartz substrates of SAW sensors....
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221725/ https://www.ncbi.nlm.nih.gov/pubmed/32326639 http://dx.doi.org/10.3390/nano10040760 |