Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of the resonating body has been numerically derived and consists of seven star-polygons that form a fractal structure. The actual resonator is defined by focused ion-beam implantation on a SOI wafer where its 18 ver...

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Detalles Bibliográficos
Autores principales: Tzanov, Vassil, Llobet, Jordi, Torres, Francesc, Perez-Murano, Francesc, Barniol, Nuria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221872/
https://www.ncbi.nlm.nih.gov/pubmed/32340340
http://dx.doi.org/10.3390/nano10040811

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221872/
https://www.ncbi.nlm.nih.gov/pubmed/32340340
http://dx.doi.org/10.3390/nano10040811

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