Cargando…
Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator
Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of the resonating body has been numerically derived and consists of seven star-polygons that form a fractal structure. The actual resonator is defined by focused ion-beam implantation on a SOI wafer where its 18 ver...
| Autores principales: | , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7221872/ https://www.ncbi.nlm.nih.gov/pubmed/32340340 http://dx.doi.org/10.3390/nano10040811 |