Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement

Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibili...

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Detalles Bibliográficos
Autores principales: Hashimoto, Masaaki, Taguchi, Yoshihiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230398/
https://www.ncbi.nlm.nih.gov/pubmed/32235583
http://dx.doi.org/10.3390/mi11040362

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230398/
https://www.ncbi.nlm.nih.gov/pubmed/32235583
http://dx.doi.org/10.3390/mi11040362

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