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Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement
Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibili...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230398/ https://www.ncbi.nlm.nih.gov/pubmed/32235583 http://dx.doi.org/10.3390/mi11040362 |