Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects

There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS–SOI transistor integrated with a catalytic react...

Descripción completa

Detalles Bibliográficos
Autores principales: Shlenkevitch, Dima, Stolyarova, Sara, Blank, Tanya, Brouk, Igor, Nemirovsky, Yael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230676/
https://www.ncbi.nlm.nih.gov/pubmed/32224994
http://dx.doi.org/10.3390/mi11040345

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230676/
https://www.ncbi.nlm.nih.gov/pubmed/32224994
http://dx.doi.org/10.3390/mi11040345

Ejemplares similares