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Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects
There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS–SOI transistor integrated with a catalytic react...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230676/ https://www.ncbi.nlm.nih.gov/pubmed/32224994 http://dx.doi.org/10.3390/mi11040345 |
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author | Shlenkevitch, Dima Stolyarova, Sara Blank, Tanya Brouk, Igor Nemirovsky, Yael |
author_facet | Shlenkevitch, Dima Stolyarova, Sara Blank, Tanya Brouk, Igor Nemirovsky, Yael |
author_sort | Shlenkevitch, Dima |
collection | PubMed |
description | There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS–SOI transistor integrated with a catalytic reaction plate acts as a sensing element. This study emphasizes GMOS performance modeling, technological aspects, and sensing-selectivity issues. Two deposition techniques of a Pt catalytic layer suitable for wafer-level processing were compared, magnetron sputtering and nanoparticle inkjet printing. Both techniques have been useful for the fabrication of GMOS sensor, with good sensitivity to ethanol and acetone in the air. However, a printed Pt nanoparticle catalyst provides almost twice as much sensitivity as compared to that of the sputtered catalyst. Moreover, sensing selectivity in the ethanol/acetone gas mixture was demonstrated for the GMOS with a Pt nanoparticle catalyst. These advantages of GMOS allow for the fabrication of a low-cost gas sensor that requires a low power, and make it a promising technology for future smartphones, wearables, and Internet of Things (IoT) applications. |
format | Online Article Text |
id | pubmed-7230676 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-72306762020-05-22 Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects Shlenkevitch, Dima Stolyarova, Sara Blank, Tanya Brouk, Igor Nemirovsky, Yael Micromachines (Basel) Article There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses. This paper presents a miniature combustion-type gas sensor (GMOS) based on a thermal sensor, where a micromachined CMOS–SOI transistor integrated with a catalytic reaction plate acts as a sensing element. This study emphasizes GMOS performance modeling, technological aspects, and sensing-selectivity issues. Two deposition techniques of a Pt catalytic layer suitable for wafer-level processing were compared, magnetron sputtering and nanoparticle inkjet printing. Both techniques have been useful for the fabrication of GMOS sensor, with good sensitivity to ethanol and acetone in the air. However, a printed Pt nanoparticle catalyst provides almost twice as much sensitivity as compared to that of the sputtered catalyst. Moreover, sensing selectivity in the ethanol/acetone gas mixture was demonstrated for the GMOS with a Pt nanoparticle catalyst. These advantages of GMOS allow for the fabrication of a low-cost gas sensor that requires a low power, and make it a promising technology for future smartphones, wearables, and Internet of Things (IoT) applications. MDPI 2020-03-26 /pmc/articles/PMC7230676/ /pubmed/32224994 http://dx.doi.org/10.3390/mi11040345 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Shlenkevitch, Dima Stolyarova, Sara Blank, Tanya Brouk, Igor Nemirovsky, Yael Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title | Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title_full | Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title_fullStr | Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title_full_unstemmed | Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title_short | Novel Miniature and Selective Combustion-Type CMOS Gas Sensor for Gas-Mixture Analysis—Part 1: Emphasis on Chemical Aspects |
title_sort | novel miniature and selective combustion-type cmos gas sensor for gas-mixture analysis—part 1: emphasis on chemical aspects |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7230676/ https://www.ncbi.nlm.nih.gov/pubmed/32224994 http://dx.doi.org/10.3390/mi11040345 |
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