A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect

A novel micromachined z-axis torsional accelerometer based on the tunneling magnetoresistive effect is presented in this paper. The plane main structure bonded with permanent magnetic film is driven to twist under the action of inertial acceleration, which results in the opposite variation of the ma...

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Detalles Bibliográficos
Autores principales: Yang, Bo, Gao, Xiaoyong, Li, Cheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231319/
https://www.ncbi.nlm.nih.gov/pubmed/32316624
http://dx.doi.org/10.3390/mi11040422

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231319/
https://www.ncbi.nlm.nih.gov/pubmed/32316624
http://dx.doi.org/10.3390/mi11040422

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