A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force

This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, t...

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Detalles Bibliográficos
Autores principales: Aryal, Niwit, Emadi, Arezoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231325/
https://www.ncbi.nlm.nih.gov/pubmed/32290392
http://dx.doi.org/10.3390/mi11040401

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231325/
https://www.ncbi.nlm.nih.gov/pubmed/32290392
http://dx.doi.org/10.3390/mi11040401

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