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A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force
This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, t...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7231325/ https://www.ncbi.nlm.nih.gov/pubmed/32290392 http://dx.doi.org/10.3390/mi11040401 |